VTS-CreaTec GmbH - MBE-Systems

MBE/CVD and Surface Analysis System
MBE-SiC

Load-lock Chamber:

• Diameter: 40 mm
• Sample storage up to 6 samples
• 2" Substrate Size
• Sample Degassing Station

Reactor and Growth Chamber:

• Diameter: 450 mm
• 8 Ports for Effusion Cells, E-Beam Evaporators, Plasma Source
• 4 Ports for Gas Injectors and Crackers
• Heatable Sample Manipulator up to 1300°C, Sample Rotation
• Ports for RHEED, Flux Monitor, Pyrometer, RGA
• Pumping System: Ion Pump with Integrated Titanium Sublimation Pump, Turbo Molecular Pump with Magnetic Bearings and Cryopump, Base Pressure: <1x10-11 mbar
• A tight shutter separates the analysis and the deposition area

Surface Analysis Chambers:

• Ports for Hemispherical Energy Analyzer, X-Ray Source, UV-Source, Electron Source, Ion Source, Mass Spectrometer, LEED Optics
• AFM/STM with Helium Cooling and Highest Resolution SEM Capabilities
• Heatable Sample Manipulator

For further Information contact sales@vts-createc.com.