VTS-CreaTec GmbH - MBE-Systems

MBE System for III-V Materials
 

MBE System with two Growth Chambers for III-V Materials

Load-lock Chamber:

• Sample Load Lock Station and Buffer Chamber
• Sample storage up to 6 specimen
• 2" Substrate Size (larger wafer size handling available)
• Sample Degassing Station

Growth Chamber:

• UHV Growth Chamber with cryo-shroud
• 8 (or more) Ports for Effusion Cells, E-Beam Evaporators, Plasma Source
• 8 (or more) Ports for pneumatically (electrically, manually) operated Shutters
• Heatable Sample Manipulator up to 1300°C, automated Sample Rotation
• Ports for In-Situ Characterization Tools, RHEED, Flux Monitor, Pyrometer, RGA
• Pumping System: Ion Pump with Integrated Titanium Sublimation Pump, Turbo Molecular Pump and Cryopump, Base Pressure: <1x10-11 mbar
• A hermetically sealed shutter system seperates the vacuum vessels.

For further Information contact sales@vts-createc.com.